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发明名称
MAGNETISCHE IMMERSIONSLINSE MIT DETEKTIONSANORDNUNG
摘要
申请公布号
DE60032591(D1)
申请公布日期
2007.02.08
申请号
DE20006032591
申请日期
2000.03.17
申请人
SHIMADZU RESEARCH LABORATORY (EUROPE) LTD.
发明人
MARUI, TAKAO;BADHEKA, RANJAN KRISHNACHANDRA;READ, FRANK HENRY
分类号
H01J37/26;H01J37/141;H01J37/244;H01J37/28
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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