| 摘要 |
PROBLEM TO BE SOLVED: To provide a ultrathin film moving element capable of significantly shortening the time required until subsidence of vibration by reducing the vibration caused during the pull-in, to provide an array of the element, as well as, a drive method of the array, and to realize higher speed movement of the element. SOLUTION: The ultrathin film moving element 100 is provided with a movable part that is held so as to be elastically displaceable and that has in part a movable electrode 28, and is also provided with fixed electrodes, arranged facing the movable part, wherein the movable part 27 is displaced by static electric force, corresponding to a voltage applied to the movable electrode 28 and the fixed electrodes 35a, 35b. The voltage, to be applied to the movable electrode 28 and the fixed electrodes 35a, 35b, is set in a range equal to or smaller than the static pull-in voltage as well as equal to or larger than the minimum dynamic pull-in voltage. COPYRIGHT: (C)2007,JPO&INPIT |
