| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for surface treatment with high pressure plasma capable of mixing a reactive substance with a discharging gas safely by making the substance into mist under a normal temperature. SOLUTION: The method comprises generating an oscillating ultrasonic wave of frequency of 250 kHz or higher by a mixing device 14, whereby a liquid organic substance containing a reactive substance is made into mist, and mixing the mist of the organic substance with a discharging gas in a plasma device 20, wherein the discharging gas is generated by plasma generation in the plasma device 20 and a reaction with the organic substance is conducted, whereby a coating film is formed on a surface of a substrate material. COPYRIGHT: (C)2007,JPO&INPIT |
