| 摘要 |
PROBLEM TO BE SOLVED: To uniformly cool a cooled object in a cooler for cooling the cooled object using liquefied gas. SOLUTION: The cooler comprises liquefied gas passages 2 in which nozzles 21 jetting liquefied gas toward the cooled object X are formed at equal spaces, and a liquefied gas supply part 1 supplying liquefied gas to the liquefied gas passage 2. COPYRIGHT: (C)2007,JPO&INPIT
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