发明名称 Mask for sequential lateral solidification and method of manufacturing the same
摘要 A mask for sequential lateral solidification capable of preventing pattern deformation that may be caused by laser beam, and a method of manufacturing the same are provided. The mask includes a transparent substrate, and a heat-resistant oxide film pattern, disposed on the transparent substrate, blocking a laser beam.
申请公布号 US2007032050(A1) 申请公布日期 2007.02.08
申请号 US20060499477 申请日期 2006.08.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHUNG SE-JIN;KIM DONG-BUM
分类号 H01L21/20;H01L21/268 主分类号 H01L21/20
代理机构 代理人
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