| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for arraying both of the point of action of a working member (for example, a nozzle) and the point of measurement of a photosensor on a straight line in the working direction (for example, the flow direction of a coating agent to be applied from the nozzle) of the working member of instrument for precision work (for example, a coater). SOLUTION: The device for measuring displacement is provided with: a first housing case 3 for housing a floodlight part; a second housing case 4 for housing a photodetector part; and a connection member 5 for fixing the first housing case and the second housing case in such a position that the photodetector part can receive the light regularly reflected on an object when the object receives the light outgoing from the floodlight part. An injection member of the coater is inserted into a space 6 which is formed by the first housing case 3, the second housing case 4 and the connection member 5 and faces such a position that the light outgoing from the floodlight part is regularly reflected when viewing the first housing case 3, the second housing case 4 and the connection member 5 from above. COPYRIGHT: (C)2007,JPO&INPIT
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