| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an automatic optical axis correction method of a telecentric optical system for automatically correcting the travel of an image by the twisting of an optical axis, and to provide an automatic optical axis correction telecentric optical device and an exposing device. <P>SOLUTION: There are provided: a telecentric optical system comprising a pair of lens systems 5, 6 that are subjected to infinite distance correction; a light source 15 for detection for projecting collimate light coaxially with the light axis of the lens system 6 toward the lens system 5; light deflectors 7, 8 each capable of varying the propagation direction of the incident light of the lens system 5 to an external electric signal while being positioned in the middle of the lens systems 5, 6; a light spot position detector 19 for detecting a light spot position formed by the emitted light of a condensing lens 18 sharing an optical axis with the lens system 5; and an optical axis control unit 14 for optically correcting the bending vibration of the optical system of the telecentric optical system by controlling the light deflectors 7, 8 by generating an external electric signal so that angle deviations of optical axes of the lens systems 5, 6 reach permissible values or smaller based on the light spot position. <P>COPYRIGHT: (C)2007,JPO&INPIT |
