发明名称 METHOD FOR PREDICTING LIFE OF CRUCIBLE, DEVICE THEREFOR AND VAPOR DEPOSITION FACILITY
摘要 PROBLEM TO BE SOLVED: To predict the life of a crucible and prevent an accident such as breakage and material leakage before it will happen. SOLUTION: This method for predicting the life of the crucible (P) made from a non-conductive material comprises the steps of: making an internal electrode 3 contact with the inner surface of the bottom wall (Pb) through a solidified material (M); making an external electrode 2 contact with the external surface of the bottom wall (Pb); measuring a capacitance of the bottom wall (Pb) of the crucible (P) sandwiched between the electrodes, with a capacitance meter 4, while considering the bottom wall (Pb) as a dielectric substance; and predicting the life of the crucible (P) based on the measured value. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007031772(A) 申请公布日期 2007.02.08
申请号 JP20050216583 申请日期 2005.07.27
申请人 HITACHI ZOSEN CORP 发明人 IKUTA HIROYUKI
分类号 C23C14/24 主分类号 C23C14/24
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