发明名称 |
SENSOR MIT KANTILEVER UND OPTISCHEM RESONATOR |
摘要 |
<p>An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever ( 3 ) using an optical resonator between the cantilever ( 3 ) and an output surface ( 12 b) of a lens assembly ( 10 ). In order to form the resonator, output surface ( 12 b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly ( 10 ) and cantilever ( 3 ) comparatively large.</p> |
申请公布号 |
DE60211388(T2) |
申请公布日期 |
2007.02.08 |
申请号 |
DE2002611388T |
申请日期 |
2002.08.14 |
申请人 |
SWISSPROBE AG |
发明人 |
FREDERIX, LOUIS;HUG, JOSEF |
分类号 |
B81B3/00;G01D5/26;G01D5/353;G01Q10/00;G01Q20/02;G01Q30/02;G01Q60/24;G01Q70/00;G02B26/10 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|