| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an exact liquid level position-adjusting mechanism for pulling a single crystal from the surface of a melt in a Czochralski method. <P>SOLUTION: Image information are obtained by photographing positions and dimensions of mirror images 11B, 11C of a heat shielding body 11 or the distance between the real image 11A and the central position (distances of central points 12A, 12B and 12C) by using a camera arranged at the outside of a furnace while changing them by moving the level of the melt 2 upward and downward. Then, the changes of the positions and the dimensions or the distances between central positions are measured at a plurality of points from the image information, and the position of the level of the melt is adjusted by using, as a base, a standard point in the image information. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
