| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holder having small distortion even if a high load is applied and capable of efficiently preventing contact failure, and capable of preventing an increase in temperature of a driving system of the wafer holder when a semiconductor having a minute circuit, especially requiring high accuracy is heated, and to provide a wafer prober device equipped with the same. SOLUTION: The wafer holder 1 consists of a chuck top 2 for placing a wafer, and a supporter 4 for supporting the chuck top 2. The flatness of the supporter 4 is set at not more than 0.1 mm. More preferably, the flatness is not more than 0.05 mm, and still more preferably, it is not more than 0.01 mm. COPYRIGHT: (C)2007,JPO&INPIT |
