| 发明名称 |
IMAGING DEVICE, DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD AND ELECTRON BEAM INSPECTION DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To improve contrast of a picked-up image by uniformalizing a potential distribution on a surface of an inspection object. SOLUTION: The imaging device irradiates an electron beam emitted from an electron gun on an object, detects electrons emitted from the object by using a detector, and carries out collection of image information of the object and inspection of a defect or the like of the object. The device has a means to uniformalize or reduce electric charge taken on the object. COPYRIGHT: (C)2007,JPO&INPIT
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| 申请公布号 |
JP2007035645(A) |
申请公布日期 |
2007.02.08 |
| 申请号 |
JP20060231971 |
申请日期 |
2006.08.29 |
| 申请人 |
TOSHIBA CORP;EBARA CORP |
发明人 |
NAKASUJI MAMORU;NOMICHI SHINJI;SATAKE TORU;HATAKEYAMA MASAKI;KANEUMA TOSHIFUMI;SOFUGAWA TAKUJI;YOSHIKAWA SEIJI;MURAKAMI TAKESHI;WATANABE KENJI;KARIMATA TSUTOMU;OWADA SHIN;NISHIFUJI MUTSUMI;YAMAZAKI YUICHIRO;NAGAI TAKAMITSU;NAGAHAMA ICHIROTA |
| 分类号 |
H01J37/20;G01B15/04;H01J37/28;H01L21/66 |
主分类号 |
H01J37/20 |
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