| 摘要 |
PROBLEM TO BE SOLVED: To provide a deaeration device, which has excellent deaeration efficiency, is low in cost, and can realize easy maintenance, an ultrasonic cleaning device using the deaeration device, and an ultrasonic cleaning device which can realize ultrasonic cleaning of an object to be cleaned in the presence of microbubbles. SOLUTION: In this ultrasonic cleaning device, a cleaning-liquid circulation path 7 is formed so that a cleaning liquid 2 in an ultrasonic cleaning tank 1 is suctioned by a circulating pump 8 and circulated through a predetermined path and is then returned to the cleaning tank again. A deaeration device 9 for bubbling dissolved air in the cleaning liquid by cavitation is connected along the cleaning-liquid circulation path 7 so as to bubble the dissolved air in the cleaning liquid flowing through the cleaning-liquid circulation path 7 by the deaeration device 9, and the bubbled dissolved air flows back to the cleaning tank 1 together with the cleaning liquid so that the bubbled dissolved air is ejected from the liquid surface of the cleaning tank outside of the tank. Moreover, a propeller-type pump is used as the circulating pump 8, and the dissolved air concentration of the cleaning liquid is controlled within a range of 2.5 to 3.5 mg/l. COPYRIGHT: (C)2007,JPO&INPIT
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