| 摘要 |
A wafer level package process includes: providing a device substrate, in which one surface of the device substrate includes a plurality of devices; providing a cap substrate and forming a plurality of cavities on one surface of the cap substrate, in which the location of each cavity is corresponding to the location of each device of the devices substrate; forming a protective cap in each cavity by utilizing the cavity as a mold; aligning each cavity of the cap substrate to each device of the device substrate and connecting the protective cap on the device substrate, such that each of the protective caps covers each device; and removing the cap substrate from the protective cap.
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