| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stacked type optical waveguide, a method capable of reducing uneven thickness as well as improving production efficiency. SOLUTION: The method include: a process of making a first optical waveguide 1 by forming a first core layer 13 on the surface of a first clad layer 12; a process of making a second optical waveguide 2 by forming a second core layer 23 on the surface of a second clad layer 22; and a process of forming a third clad layer 3, by disposing to face each other the surface of the first clad layer 12 of the first optical waveguide 1 and the surface of the second clad layer 22 of the second optical waveguide 2 and, with the first and second core layers 13, 23 placed opposite to each other, by filling a third clad layer 3 forming-material between the first and second clad layers 12, 22. COPYRIGHT: (C)2007,JPO&INPIT |
