| 摘要 |
PROBLEM TO BE SOLVED: To prevent a display device from decreasing in yield or reliability owing to a defect in contacting of a contact plug connecting mutually different wiring layers to each other in a peripheral driving circuit area which is narrower in wiring width than a display area of the display device. SOLUTION: The film thickness of a second inter-layer insulating film 10 in the peripheral driving circuit area 3 which is narrower in wiring width than the display area 2 is made less than the film thickness of a first inter-layer insulating film 9 in the display area 2, and then the aspect ratio of a contact hole in the peripheral driving circuit area 3 can be made close to the aspect ratio in the display area 2, so that a source electrode 13 and a drain electrode 14 formed in the contact hole by a sputtering method are easily connected to a polycrystalline silicon film 6. COPYRIGHT: (C)2007,JPO&INPIT |
