发明名称 SUPPLY SYSTEM AND SUPPLY METHOD FOR LIQUEFIED GAS
摘要 PROBLEM TO BE SOLVED: To provide a supply system and supply method for liquefied gas safely and stably supplying a large flow rate of high quality liquefied gas by carrying out on-demand heating control maintaining a constant internal pressure of a container filled with the liquefied gas. SOLUTION: The supply system has the container 1 filled with the liquefied gas in a liquefied state, a means 5 for jetting a heating medium on an outer face including a bottom face 1a of the container 1, a means 6 for adjusting a temperature of the heating medium and supplying the heating medium to the heating medium jetting means 5, a means 11 for recovering the jetted heating medium, a means 2 for measuring a gaseous phase part pressure in the container 1, and a means 3 for controlling a jetting amount, or a temperature and the jetting amount of the heating medium so as to maintain a constant pressure. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007032610(A) 申请公布日期 2007.02.08
申请号 JP20050213112 申请日期 2005.07.22
申请人 JAPAN AIR GASES LTD 发明人 YOKOKI KAZUO;MIYOSHI SHINJI;INO MINORU;YANAGIDA TOMOKO
分类号 F17C7/00;C23C16/448;F17C13/00;H01L21/205 主分类号 F17C7/00
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