摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor capable of easily making a removal and assembly structure, suppressing a deterioration in performance, and superior in expandability. <P>SOLUTION: In the flow sensor measuring the flow rate of a fluid from the variation in resistance value caused by a fluid cooling or heating a heat generating resistor, a fluid passage directing the fluid traveling in the direction parallel to the mounting surface of the resistor to the direction passing through the resistor is provided. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |