| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device improving temperature distribution caused by microwaves while preventing drying of a surface of a heated object. SOLUTION: The heating device comprises a heating chamber 10 for enclosing the heated object A; a steam injecting means 31 for injecting steam toward the heated object A from above; and an antenna (a microwave irradiating means) 14 for irradiating the inside of the heating chamber 10 with microwaves from below. Although there is a tendency that the center temperature of the heated object A is high and the peripheral temperature is low by heating with microwaves and there is also a tendency that the lower part temperature of the heated object A is high and the upper part temperature is low by irradiating microwaves from below, since steam is injected toward the heated object from above, the steam directly collides with the upper part of the heated object A, and the upper part and peripheral temperature can be made high in a short time. Drying of the surface of the heated object can thereby be prevented, and the temperature distribution of the heated object can be improved. COPYRIGHT: (C)2007,JPO&INPIT
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