A method of detecting a molecular species in an electronics processing environment is disclosed. The method exposes a capture substrate to the processing environment. The capture substrate has a surface area different from the surface area of an electronic substrate undergoing electronics processing. The molecular species is transferred from the environment to the capture substrate. A characteristic of the molecular species is identified, thereby detecting the species. Other methods utilize a capture substrate to remove the molecular species from an electronic processing environment, or use the capture substrate to determine the presence of a molecular species in a transfer container operating between two process environments or two intermediate process steps. Systems for carrying out the methods are also disclosed.
申请公布号
WO2007016453(A2)
申请公布日期
2007.02.08
申请号
WO2006US29670
申请日期
2006.07.31
申请人
ENTEGRIS, INC.;ALVAREZ, DANIEL, JR.;SCOGGINS, TROY, B.