| 摘要 |
PROBLEM TO BE SOLVED: To provide a peristaltic type piezoelectric micropump having a simple structure, highly accurately controlling a minute flow rate and easily manufactured. SOLUTION: This peristaltic type piezoelectric micropump comprises a lower substrate 307 having an inflow port 308 and an outflow port 309; an upper substrate 304 fixed to the lower substrate 307 in an annular region on the outer periphery; a lower electrode 303 formed on the surface of the upper substrate 304; a piezoelectric body 302 fixed to the surface of the lower electrode 303; and upper electrodes 301a to 301f formed on the surface of the piezoelectric body 302. By applying necessary voltage to the upper electrodes 301a to 301f, a pump chamber is formed between the lower substrate 307 and the upper substrate 304. COPYRIGHT: (C)2007,JPO&INPIT
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