摘要 |
The present invention relates to inter-chip electrostatic discharge (ESD) protection structures for high speed, and high frequency devices that contain one or more direct, inter-chip signal transmission paths. Specifically, the present invention relates to a structure that contains: (1) a first chip including a first circuit, (2) a second chip including a second circuit, (3) an intermediate insulator layer located between the first and second chips, wherein the first and second circuits form a signal transmission path for transmitting signals through the intermediate insulator layer. An electrostatic discharge (ESD) protection path is provided in the structure between the first and the second chip through the intermediate insulator layer, to protect the signal transmission path from ESD damages. |