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发明名称
AQUEOUS POLISHING SLURRY FOR POLISHING METAL CIRCUITS COMPRISING SILICA COATED WITH GAMMA ALUMINA AND PROCESS FOR PREPARING THE SAME
摘要
申请公布号
KR20070016682(A)
申请公布日期
2007.02.08
申请号
KR20050071550
申请日期
2005.08.05
申请人
发明人
分类号
C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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