| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mounting method for preventing tilting when an inertial sensor element formed by etching a quartz plate of a Z plate is mounted in a container, or tilting when the container storing the sensor element is mounted in a user substrate. <P>SOLUTION: In the mounting method of storing, in the container, the inertial sensor element for providing an angular velocity by exciting a fork-shaped quartz oscillating piece about the center thereof as a rotation axis and by detecting Coriolis force generated by occurrence of the torque of the rotation axis, a segment mark is formed in at least one place of the main face of the inertial sensor element, a segment mark is formed in at least one place of the storage vessel, and both segment marks are aligned to determine the mounting direction of the sensor element. <P>COPYRIGHT: (C)2007,JPO&INPIT |
