发明名称 DRIVING CURRENT CONTROL METHOD FOR PLASMA GENERATION DEVICE, AND PLASMA GENERATION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a plasma generation device and a driving current control method therefor that generate plasma continuously stably. <P>SOLUTION: An induction coil 31 is positioned around a torch body 25 for passing a plurality of gases to form a plasma torch 23. An oscillator 32 supplies a high frequency alternating current to the induction coil 31 of the plasma torch 23 to generate a high frequency electromagnetic field, which inductively ionizes the gas supplied to the torch body 25 to generate thermal plasma as a plasma flame. A controller 51 detects a current value Ip supplied from the oscillator 32 to the induction coil 31 and controls a supply voltage Vp to the oscillator 32 such that the current value remains within a first range. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007035486(A) 申请公布日期 2007.02.08
申请号 JP20050218393 申请日期 2005.07.28
申请人 SUMITOMO ELECTRIC IND LTD 发明人 ANZAI SHUNICHI;SUZUKI TOMOYA
分类号 H05H1/36;C03B8/04;C03B37/018;H05H1/30 主分类号 H05H1/36
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