THIN FILM PIEZOELECTRIC RESONATOR, FILTER AND METHOD FOR MANUFACTURING THIN FILM PIEZOELECTRIC RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator provided with sealing structure capable of preventing the destruction of a cavity and highly accurately adjusting a resonance frequency. SOLUTION: The thin film piezoelectric resonator is provided with: a substrate 10 having the cavity on the surface; a lower electrode 12 extended from the surface of the substrate 10 to the surface of the cavity 30; a piezoelectric film 14 formed on the lower electrode 12; an upper electrode 16 arranged on the piezoelectric film 14 oppositely to the lower electrode 12 and then extended from the piezoelectric film 14 to the substrate 10; and a sealing member including a resonance part regulated by an area in which the lower electrode 12 and the upper electrode 16 are opposed to each other in its inside and formed on the substrate 10 so that an aperture part 42 extended from the cavity 30 is located on the outside to seal the resonance part. COPYRIGHT: (C)2007,JPO&INPIT