| 发明名称 |
ELECTRIC FIELD EMITTER ARRANGEMENT AND METHOD FOR CLEANING EMISSION SURFACE OF ELECTRIC FIELD EMITTER |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electric field emitter arrangement and a method for cleaning an emission surface of an electric field emitter. <P>SOLUTION: This electric field emitter arrangement 100 is provided with an electric field emitter chip 10 having the emission surface 11 generating a primary beam 15 of charged particles and at least one electron source 20 irradiating the emission surface 11 of the electric field emitter chip 10. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
| 申请公布号 |
JP2007035642(A) |
申请公布日期 |
2007.02.08 |
| 申请号 |
JP20060222757 |
申请日期 |
2006.07.21 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
ADAMEC PAVEL;ZHOU FAN |
| 分类号 |
H01J1/304;B82B3/00;H01J1/34;H01J9/50;H01J37/073 |
主分类号 |
H01J1/304 |
| 代理机构 |
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代理人 |
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| 主权项 |
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