| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a versatile flow controller easy to handle, and a regulator unit and a valve unit used therefor. <P>SOLUTION: The flow controller 10 comprises the regulator unit 11 including a regulator 21 and a first pressure sensor 22, the valve unit 12 including a second pressure sensor 31 and a flow control valve 32, and an orifice unit 13 which is detachably connected to the regulator unit 11 and the valve unit 12 to constitute a fluid passage and an orifice connecting the regulator unit 11 to the valve unit 12. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
