| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance reliability by maintaining an exhaust gas treatment ability at maintenance/inspection or the like when a perfluoride in the exhaust discharged from a production process apparatus for handling the perfluoride is decomposed/treated. <P>SOLUTION: An auxiliary perfluoride decomposition apparatus 3 is provided on one or a plurality of perfluoride decomposition apparatuses 1, 2 for treating the exhaust gas containing the perfluoride, the object to be treated. When a treatment function of at least one of the perfluoride decomposition apparatuses is reduced, at least a part of the exhaust gas introduced to the perfluoride decomposition apparatus whose the treatment function is reduced is treated by the auxiliary perfluoride decomposition apparatus. Thereby, reliability can be enhanced by maintaining the exhaust gas treatment ability at maintenance/inspection or the like. <P>COPYRIGHT: (C)2007,JPO&INPIT |
