| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture an optical disk original plate compatible with high density recording more simply and more satisfactorily in surface properties. <P>SOLUTION: An underlayer 2 comprising zinc (Zn), sulfur (S) and a silicon oxide (SiO<SB>2</SB>) is deposited on a substrate 1, an inorganic resist layer 3 comprising the imperfect oxide of a transition metal is deposited on the under layer 2, the inorganic resist layer 3 is irradiated with a laser beam to form a latent image and the inorganic resist layer 3 is developed. Satisfactory sensitivity can be obtained, while preventing a reaction layer insoluble in a developer from being formed in the interface between the under layer 2 and the inorganic resist layer 3 at exposure by providing the under layer 2 between the substrate 1 and the inorganic resist layer 3. <P>COPYRIGHT: (C)2007,JPO&INPIT |
