| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact having plasma gas resistance and high thermal conductivity and excellent optical properties. <P>SOLUTION: The aluminum nitride sintered compact is characterized in that, in defect analysis in positron annihilation method, the ratio of positrons annihilated within 180 ps (picosecond) in aluminum nitride crystals is ≥90%, and preferably has thermal conductivity of ≥200 W/mK. <P>COPYRIGHT: (C)2007,JPO&INPIT |
