ELECTROMAGNETIC WAVE DETECTOR, RADIATION DETECTOR, AND RADIATION IMAGING SYSTEM

摘要

PROBLEM TO BE SOLVED: To irradiate the light from a rear face efficiently on a photoelectric conversion element by preventing the rear face light from being incident into a TFT which is a switch element.

SOLUTION: The electromagnetic wave detector is formed with a plurality of pixels. Each pixel includes a conversion element for converting electromagnetic waves into an electric signal which consists of a first electrode arranged on a first plane of an insulation substrate, a second electrode arranged on the first electrode, and a semiconductor layer arranged between the first and the second electrode; and a switch element connected to the conversion element. The first electrode is formed of a translucent conductive material which causes the light emitted from a light source arranged on the second plane side opposite to the first plane of the insulation substrate to pass through. The switch element includes a light shielding member for preventing the light from the light source from being incident into the switch element.

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