| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS switch driven by piezoelectric force and electrostatic force and capable of preventing stiction between contacts. SOLUTION: This MEMS switch comprises a substrate 110, a first contact 120 located in a prescribed first area on an upper surface of the substrate 110, a supporting layer 130 floating and separated from the upper surface of the substrate 110 by a prescribed distance, a second contact 140 formed in a lower surface of the supporting layer 130, a first actuator 150 moving the supporting layer 130 in a prescribed direction by using the electrostatic force, and a second actuator 160 moving the supporting layer 130 in a prescribed direction by using the piezoelectric force. COPYRIGHT: (C)2007,JPO&INPIT
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