| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder which prevents corrosion of a structural component even when high-concentration hydrofluoric acid, phosphoric acid or sulfuric acid is used as a process liquid, when a plurality of substrates are held on the substrate holder and soaked in the process liquid in a processing tank to process. SOLUTION: The substrate holder 12 is constituted by including: a moving member 26 formed of SiC which is movably supported between the inside and the outside of the processing tank 10 in which the process liquid is stored; a plurality of substrate holding frames 28 and 30, which are fixed to the moving member 26 and arranged in a horizontal direction along the array direction of a substrate W; and holding members 34a, 34b, 36a, and 36b which are provided to the substrate holding frames 28 and 30 and are brought into contact with the lower end of the substrate W to hold the substrate W. COPYRIGHT: (C)2007,JPO&INPIT |
