DUAL CHIP ATOMIC FORCE MICROSCOPE PROBE AND MANUFACTURING METHOD FOR IT

摘要

PROBLEM TO BE SOLVED: To provide a dual chip AFM probe and a manufacturing method for it having a plurality of electrically insulated chips. SOLUTION: This atomic force microscope probe is constructed of a chip structure 3 having two chips 7 and 8 on a cantilever 2. The probe chips are electrically insulated from each other and have substantially the same height to the cantilever. The surface of the chip structure 3 has an object shaped into a form having a bottom face and an apex. The object is divided into two parts 5 and 6 by a clearance 4 positioned substantially symmetrically to the apex. This invention has relationship to the manufacturing method of this kind of AFM probe. COPYRIGHT: (C)2007,JPO&INPIT