| 摘要 |
PROBLEM TO BE SOLVED: To detect the temperature of a cooling medium at low cost in a heat generating unit having a plurality of cooling medium passages and to suppress defects caused by temperature rise of the heat generating unit at an early stage. SOLUTION: This cooling device for the heat generating unit is provided with the plurality of cooling medium passages 2<SB>1</SB>to 2<SB>n</SB>where a cooling medium W circulates; a cooling medium container 7; a cooling medium return passage 6; and a temperature sensor 8 arranged in the vertically upper side of the cooling medium container 7. After cooling heat generating portions 1<SB>1</SB>to 1<SB>n</SB>, part of the cooling medium W is taken out from the respective cooling medium passages 2<SB>1</SB>to 2<SB>n</SB>and introduced to the cooling medium container 7. The cooling medium return passage 6 returns the cooling medium W inside the cooing medium container 7 to the downstream side of the flowing direction of the cooling medium W flowing on the cooling medium passages 2<SB>1</SB>to 2<SB>n</SB>from cooling medium output ports 5i<SB>1</SB>to 5i<SB>n</SB>. The cooling device for the heat generating unit adjusts a flow rate of the cooling medium W circulating on the cooling medium passages 2<SB>1</SB>to 2<SB>n</SB>based on a detection result of the temperature sensor 8. COPYRIGHT: (C)2007,JPO&INPIT
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