| 摘要 |
PROBLEM TO BE SOLVED: To connect a ground line to each vibrating element without installing common ground electrodes to a plurality of vibrating elements in an ultrasonic prove with the plurality of vibrating elements. SOLUTION: A 2D array vibrator 14 is composed of the plurality of vibrating elements 15. A backing 16 has a signal reed array and a ground reed array. A ground connection structure is constructed between the adjacent vibrating elements 15 in a X direction. The ground connection structure has a pair of side plane electrodes 34 which face each other. A ground lead 26 is connected with an upper face electrode 30 through the side plane electrode 34. In a Y direction, it is possible to install the ground connection structure in every other one in a plurality of isolating grooves 22, or to install the ground connection structure in every isolating grooves 22. Each vibrating element can be a layered type. COPYRIGHT: (C)2007,JPO&INPIT
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