发明名称 Method for manufacturing p-type gallium nitride compound semiconductor, method for activating p-type impurity contained in gallium nitride compound semiconductor, and apparatus for activating p-type impurity contained in gallium nitride compound semiconductor
摘要 A method for manufacturing a p-type gallium nitride compound semiconductor includes providing a gallium nitride compound semiconductor containing a p-type impurity on a surface of a conductive substrate, immersing in an electrolytic solution the conductive substrate on which the gallium nitride compound semiconductor is provided, providing a cathode to be in contact with the electrolytic solution, and applying a current between the cathode and the conductive substrate serving as an anode to activate the p-type impurity.
申请公布号 US2007029558(A1) 申请公布日期 2007.02.08
申请号 US20060489872 申请日期 2006.07.20
申请人 KYOCERA CORPORATION 发明人 NISHIZONO KAZUHIRO
分类号 H01L33/32;H01L33/40 主分类号 H01L33/32
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