发明名称 Method and system for printing lithographic images with multiple exposures
摘要 System and method is disclosed for breaking a design to be printed into two or more exposures, each of which has at least the minimum pitch. Together, these multiple exposures print a design that could not be printed in one exposure alone.
申请公布号 US2007031738(A1) 申请公布日期 2007.02.08
申请号 US20060405029 申请日期 2006.04.14
申请人 HUCKABAY JUDY 发明人 HUCKABAY JUDY
分类号 G03F1/00;G03B27/42;G03C5/00;G03F9/00 主分类号 G03F1/00
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