发明名称 Mask for sequential lateral solidification and method of manufacturing the same
摘要 <p>A mask for sequential lateral solidification capable of preventing pattern deformation that may be caused by laser beam, and a method of manufacturing the same are provided. The mask includes a transparent substrate, and a heat-resistant oxide film pattern, disposed on the transparent substrate, blocking a laser beam.</p>
申请公布号 KR20070016605(A) 申请公布日期 2007.02.08
申请号 KR20050071414 申请日期 2005.08.04
申请人 发明人
分类号 H01L21/20;H01L21/268 主分类号 H01L21/20
代理机构 代理人
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