发明名称 ALKALINE-DEVELOPABLE PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide an alkaline-developable photosensitive resin composition that is superior in sensitivity, resolution, transparency, adhesion and alkali resistance and is capable of accurately forming fine patterns. <P>SOLUTION: The alkaline-developable photosensitive resin composition contains a reaction product, obtained by sequentially esterifying a polybasic acid anhydride (C) and a polyfunctional epoxy compound (D) with an epoxy adduct, having a structure formed by adding an unsaturated monobasic acid (B) to an epoxy resin (A), wherein the epoxy adduct has the structure formed by adding 0.1-1.0 piece of carboxyl group of the unsaturated monobasic acid (B) to 1 epoxy group of the epoxy resin (A), and esterification is performed in a ratio of 0.1-1.0 acid anhydride structure of the polybasic acid anhydride (C) and in a ratio of 0.1-1.0 epoxy group of the polyfunctional epoxy compound (D) to 1 hydroxyl group of the epoxy adduct. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007034279(A) 申请公布日期 2007.02.08
申请号 JP20060155876 申请日期 2006.06.05
申请人 ADEKA CORP 发明人 MAKABE YOSHIE;SATO NAOMI;MAEDA NAOKI;FUCHIGAMI KAZUYUKI
分类号 G03F7/027;C08F290/14;C08G59/14 主分类号 G03F7/027
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