| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal evaluation method and a crystal evaluation device, capable of evaluating an internal structure of a crystalline thin film of perovskite type oxide. SOLUTION: This device includes a measurement part 110 which irradiates X-rays to a sample including crystals of the perovskite type oxide placed on a sample stand and detects characteristic X-rays generated from the sample, and a processing part 50 which determines kinds of elements located at a specific crystal site based on intensity of the characteristic X-rays detected by the measurement part. COPYRIGHT: (C)2007,JPO&INPIT
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