| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope having high support rigidity under little influence of vibration or a temperature change, constituted of a thin unit so that an objective lens or an illumination device can be brought sufficiently close to a sample when being combined with an optical microscope, and having a Z-axis coarse adjustment mechanism so that alignment between a probe and the sample can be performed easily. SOLUTION: The Z-axis coarse adjustment mechanism 110 for bringing a scanning probe microscope unit 4 on which the probe 21 is mounted close to the sample S has a constitution having an upper face moving table movable in the Z-axis direction, an opening part 113 which is hollow from the upper face to the lower face, and a notch from an outer circumferential part to an inner circumferential part surrounding the periphery of the hollow opening part 113. The scanning probe microscope unit 4 is fixed to an XY-stage 140 provided on the upper face moving table and arranged in the hollow opening part 113. COPYRIGHT: (C)2007,JPO&INPIT
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