| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent film detector capable of precisely recognizing a transparent film regardless of an arrangement direction. SOLUTION: A target 20 is irradiated with P polarized light from a floodlight projection part 1 and the P polarized light component D<SB>P</SB>and S polarized light component D<SB>S</SB>contained in the reflected light from the target 20 are measured by a light detecting part 2. An evaluated value (D<SB>1</SB>+kD<SB>2</SB>) is compared with a discrimination threshold value Hth in a film discrimination part 3 to recognize whether the target 20 has the transparent film. The coefficient (k) and the discrimination threshold value Hth used in this discrimination processing are determined on the basis of at least two measuring results measured by differentiating the arrangement directions of the target 20 having the transparent film at the time of a teaching mode. COPYRIGHT: (C)2007,JPO&INPIT
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