| 摘要 |
A method of making a coated article including a transparent conductive oxide (TCO) film supported by a glass substrate is provided. In certain embodiments, the coated article including the TCO film on the glass substrate is thermally tempered in a tempering furnace with an inorganic protective film (e.g., of or including silicon nitride) being provided on the glass substrate over the TCO film during tempering in order to prevent or reduce oxidizing of the TCO during the tempering process. Since oxidizing of the TCO film during the tempering process is prevented or reduced, the TCO film is able to maintain its electrically conductivity, even after tempering.
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