| 摘要 |
PROBLEM TO BE SOLVED: To obtain current and phase to be used in actual process control, when setting the original position of a linear motor, so as to position, at a high speed and with accuracy, a portal stage whose shift is controlled by the use of the linear motor. SOLUTION: This method includes a process of determining one linear motor as a reference motor and the other motor as a slave motor of one of two linear motors and positioning the portal stage to an origin mark provided on the side of a linear motor fixing part, by driving the above reference motor, also obtaining armature current and phase to be added to the reference linear motor, a process of changing the relation of master and slave and performing positioning to the origin mark and obtaining armature current and phase angle, and a process of correcting the position of the two linear motors, so that the above portal stage is vertical with respect to the shifting direction. |
