发明名称 Open hole-based diffractive light modulator
摘要 The present invention relates, in general, to a diffractive light modulator and, more particularly, to an open hole-based diffractive light modulator, which includes a lower micromirror positioned on a silicon substrate and an upper micromirror provided with a plurality of open holes spaced apart from the silicon substrate, thus allowing the upper micromirror and the lower micromirror deposited on the silicon substrate to form pixels.
申请公布号 US7173751(B2) 申请公布日期 2007.02.06
申请号 US20040952573 申请日期 2004.09.28
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 YUN SANG KYEONG
分类号 G02B26/00;B81B3/00;G02B5/18;G02B26/08;H01L41/08;H01L41/09 主分类号 G02B26/00
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