发明名称 Method for fabricating metallic interconnects on electronic components
摘要 The invention, which relates to a method for fabricating metallic interconnects with copper-nickel-gold layer construction on electronic components, is based on the object of specifying a method by means of which it is possible to fabricate such metallic interconnects on different electronic components cost-effectively by means of the known and tried and tested methods which have a comprehensive corrosion protection. According to the invention, the object is achieved by virtue of the fact that the interconnects are embodied such that they are completely encapsulated by being deposited in a manner buried in a patterned dielectric layer in the lower region and being covered in the upper region by a nickel-gold layer adjoining the lower encapsulation without any gaps.
申请公布号 US7172966(B2) 申请公布日期 2007.02.06
申请号 US20050046663 申请日期 2005.01.28
申请人 INFINEON TECHNOLOGIES AG 发明人 BRINTZINGER AXEL;TROVARELLI OCTAVIO;LEIBERG WOLFGANG
分类号 H01L21/44;H01L21/768;H01L23/532;H05K3/10;H05K3/24 主分类号 H01L21/44
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