发明名称 |
System and method for visually monitoring a semiconductor processing system |
摘要 |
The present invention relates to visually monitoring an interior portion of a processing chamber in a semiconductor processing system. An image collector collects images of the interior of the chamber and provides an image signal indicative of a visual representation of the interior of the chamber. A viewing station receives the image signal and displays a visual representation of the interior of the chamber.
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申请公布号 |
US7173648(B1) |
申请公布日期 |
2007.02.06 |
申请号 |
US20000553841 |
申请日期 |
2000.04.21 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
PHAN KHOI;RANGARAJAN BHARATH;SINGH BHANWAR;CHOO BRYAN |
分类号 |
H04N7/18;G01N21/00 |
主分类号 |
H04N7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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