| 发明名称 |
Infrared thermopile detector system for semiconductor process monitoring and control |
| 摘要 |
A thermopile-based detector for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.
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| 申请公布号 |
US7172918(B2) |
申请公布日期 |
2007.02.06 |
| 申请号 |
US20030731355 |
申请日期 |
2003.12.09 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
ARNO JOSE |
| 分类号 |
C23C16/52;H01L21/00;G01N21/35;H01L21/205 |
主分类号 |
C23C16/52 |
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